COMÉRCIO&INDUSTRIA-UNN

Quarta, 23 Fevereiro 2022 18:34 | Actualizado em Sexta, 12 Abril 2024 15:59

New multilayer coating system for wafers up to 300 mm dia. by magnetron sputtering

 The scia Multi 300, the new magnetron sputter system by German thin film equipment manufacturer scia Systems, produces precise multilayer-stacks on 300 mm wafers. The Helmholtz-Zentrum Dresden-Rossendorf (HZDR) uses the system already to produce flexible and printable magnetic field sensors.

In the volume production of semiconductor components, besides many quality requirements, the yield of usable elements is a crucial factor when selecting the equipment. One way to improve the yield is to use 300 mm wafers (12 inch) instead of the long common 200 mm (8 inch) wafers, since less edge area is unusable here.

This fact has been taken into account by the German thin film equipment manufacturer scia Systems, which is launching a new magnetron sputtering system for 300 mm wafers, the scia Multi 300.

The system was especially designed for the deposition of high-quality multilayers on wafers up to 300 mm. [.